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PDR110

Specifications
  • Travel: 360 deg
  • Resolution to 0.072 arcsec
  • Accuracy to +/-5 arcsec
  • Axial Load: 10 kg

Primatics PDR110B rotary tables are among the most advanced direct drive tables available. They feature a high performance direct drive motor that creates sub arc-second repeatability and fast settling times, making the PDR series ideal for semiconductor wafer inspection, high speed laser machining & precision metrology. The compact design also has a smaller footprint than comparable worm drives.

Superior Performance

The PDRs high efficiency neodymium servo motor permits greater acceleration, shorter settling times and less motor heating than other types of direct drive stages. In addition, the PDR motors have a high pole count, which aids in obtaining low velocity ripple even at very low speeds. The PDRs high performance motor, coupled with its platen mounted high resolution glass scale, results in high servo stiffness over a wide dynamic range.

An oversized cross roller bearing and drivetrain guarantees long, trouble-free operation. In addition, the PDR has a hemisphere switch for quick homing.